P5000 Spare Parts - P5000 Spare Parts

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P5000 Spare Parts

Part Number

Description

Photo

Gas Distribution Plate 133Holes

Pedestal 150mm Oxide/MLR

Filler Slit Valve

Liner Cathode Full Flow Oxide Etch

Liner GDP R2 Oxide

Plate Perf 150mm OX

Cylinder,Vlamping. G150mm（二氧化硅腔体圆筒）

Cylinder Clamping Poly/Msi 150MM（多晶腔体圆筒）

Cylinder,Clamping. G150mm（二氧化硅腔体圆筒）

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